Immersion lithography

Results: 40



#Item
21Technology / Extreme ultraviolet / Multiple patterning / Cymer /  Inc. / Immersion lithography / Interference lithography / Ultraviolet / Hydrogen silsesquioxane / Resist / Electromagnetic radiation / Materials science / Extreme ultraviolet lithography

[removed]February[removed]Technical Summaries

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Source URL: spie.org

Language: English - Date: 2014-11-20 05:26:27
22Extreme ultraviolet lithography / Multiple patterning / Nanoimprint lithography / Immersion lithography / Electron beam lithography / Maskless lithography / Photomask / Resist / Lithography / Microtechnology / Materials science / Technology

INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION

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Source URL: www.itrs.net

Language: English - Date: 2014-03-30 21:14:00
23Design / Semiconductor device fabrication / Electronic design / Integrated circuits / Design for manufacturability / Immersion lithography / Integrated circuit design / Yield / Resolution enhancement technologies / Electronic engineering / Electronic design automation / Electronics

DFM DRIVES NEW BUSINESS MODELS FOR DESIGN AUTOMATION DFM — WHAT CAN DESIGNERS DO? CREATING A DFM-AWARE DESIGN ENVIRONMENT FOR 65-NM AND BELOW RDRs AND THEIR IMPACT ON DFM NEEDS DFM — MITIGATING VARIABILITY

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Source URL: www.synopsys.com

Language: English - Date: 2014-11-07 12:44:02
24Computational lithography / Extreme ultraviolet lithography / Multiple patterning / Photolithography / Immersion lithography / Optical proximity correction / Lithography / Resist / Electron beam lithography / Materials science / Technology / Microtechnology

Datasheet Sentaurus Lithography Predictive Modeling of Lithographic Processes Overview

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Source URL: www.synopsys.com

Language: English - Date: 2014-11-07 14:34:17
25Extreme ultraviolet lithography / Photoresist / Applied Materials / Semiconductor device fabrication / Intel / Resist / Samsung / Immersion lithography / Multiple patterning / Microtechnology / Materials science / Technology

We Create Solutions[removed]NW Monroe Ave • Suite 203 • Corvallis, OR 97330 • [removed] Samsung, Intel Capital and Applied Materials Fund Inpria to Develop Advanced Semiconductor Materials

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Source URL: www.inpria.com

Language: English - Date: 2014-02-18 00:25:01
26Electromagnetic radiation / Nonlinear optics / Photolithography / Next-generation lithography / Dispersion / Laser / Extreme ultraviolet lithography / Immersion lithography / Optics / Physics / Photonics

Microsoft Word - Advanced linear and nonlinear optical metrology in support of next.doc

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Source URL: www.nist.gov

Language: English - Date: 2010-07-21 15:47:32
27Immersion lithography / Photolithography / Extreme ultraviolet lithography / 45 nanometer / 65 nanometer / Ultraviolet / Laser / Solid immersion lens / Computational lithography / Materials science / Technology / Optics

PROJECT PROFILE 2T304: Lithography based on quite extreme ultra high NA 193 nm optical immersion development (LIQUID) LITHOGRAPHY

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Source URL: www.catrene.org

Language: English - Date: 2009-03-25 10:36:09
28Ultraviolet / Physics / Immersion lithography / Extreme ultraviolet lithography / Photolithography / Extreme ultraviolet

T403-medea[removed]:47

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Source URL: www.catrene.org

Language: English - Date: 2009-03-25 10:37:12
29Extreme ultraviolet lithography / Immersion lithography / Multiple patterning / Extreme ultraviolet / Photomask / SUSS MicroTec / Lithography / 32 nanometer / Ultraviolet / Materials science / Electromagnetic radiation / Technology

Project result CT301 I Extreme UV lithography entry point technology development [EXEPT] The extreme ultra-violet (EUV)

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Source URL: www.catrene.org

Language: English - Date: 2013-09-04 08:46:13
30Microtechnology / Photolithography / Immersion lithography / Photomask / Photoresist / Ultraviolet / Resist / Laser / Optical coating / Materials science / Optics / Chemistry

PDF Document

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Source URL: www.ll.mit.edu

Language: English - Date: 2005-07-15 09:33:48
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